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Lesker Sputtering System
| MANUFACTURER | Lesker |
|---|---|
| MODEL | PVD75 |
London Centre for Nanotechnology
| TRAINING | No special training required. |
|---|
| CONTACT 1 | Steve Etienne |
|---|---|
| Enquire about this item | |
| SITE | Bloomsbury Campus |
Description
Lesker PVD75, three x 3 diameter sources, RF and DC Substrate RF Bias, O2 injection Max sample size 6. Material capability: Insulators ZnO, ITO, SiO2. Metals Cr, Cu, Al, Mo, Ta, Al, Au
Specification
Lesker PVD75, three x 3 diameter sources, RF and DC Substrate RF Bias, O2 injection Max sample size 6. Material capability: Insulators ZnO, ITO, SiO2. Metals Cr, Cu, Al, Mo, Ta, Al, Au
Item ID #.
Last Updated: 17th January, 2014
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