You are currently viewing only those items made visible to the public. Sign in here with your UCL username and password to view the full catalogue.
TRAINING | No special training required. |
---|
CONTACT 1 | Steve Etienne |
---|---|
Enquire about this item | |
SITE | Bloomsbury Campus |
The SSI Inc Solaris 150 Rapid Thermal Processing System (RTP) is a proven, state of the art versatile tool for Silicide formation, metal Alloys Group III Nitrides Reflow: BPSG, PSG contact anneal, Ferroelectrics, Implant anneal, HBT & MESFET Solar Cells, Implant monitoring Thermal donor, Si-Ge and LEDs.
The Solaris 150 is a manually loaded Rapid Thermal Processing System. Capable of processing silicon, III-V and other substrates up to 150mm diameter. The maximum temperature of operation is 1100 C.
Item ID #
.Last Updated: 23rd October, 2014
There are no publically available categories listed at present. You may have to sign in to browse this catalogue.