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Direct Write Laser Lithography
| MANUFACTURER | Heidelberg |
|---|---|
| MODEL | DWL 66+ |
| ACRONYM | DWL |
London Centre for Nanotechnology
| TRAINING | Training is required to use this item and we can arrange this if needed. |
|---|
| CONTACT 1 | Steve Etienne |
|---|---|
| CONTACT 2 | Vijay Krishnan |
| Enquire about this item | |
| SITE | Bloomsbury Campus |
Description
The DWL 66+ laser lithography system is an economical, high resolution pattern generator for low volume mask making and direct writing. The capabilities and flexibility of this system make it the ultimate lithographic research tool in MEMS, BioMEMS, Micro Optics, ASICs, Micro Fluidics, Sensors, CGHs, and all other applications that require microstructures.
Specification
Substrates up to 9“ x 9“, Structures down to 0.6 μm, Address grid down to 10 nm, Real time auto focus system, 375 nm UV laser source, Vector and raster exposure mode, Exchangeable write modes, Camera system for metrology and alignment, Front to backside alignment, Climate chamber and Multiple data input formats
Item ID #.
Last Updated: 29th November, 2018
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