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Viewing items matching the following properties:
- manufacturer : SPTS Ltd [x]
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Manufacturer…
Technique…
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Deep Reactive Ion Etcher
- Technique: Deep Silicon Etching
- Organisational Unit: London Centre for Nanotechnology
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Shallow Reactive Ion Etcher
Chlorine and Fluorine chemistry Inductively Coupled Plasma RIE
more details »- Organisational Unit: London Centre for Nanotechnology
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