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Rapid Thermal Processor (RTP)
| MANUFACTURER | Surface Science Iintegration |
|---|---|
| MODEL | 150 |
London Centre for Nanotechnology
| TRAINING | No special training required. |
|---|
| CONTACT 1 | Steve Etienne |
|---|---|
| Enquire about this item | |
| SITE | Bloomsbury Campus |
Description
The SSI Inc Solaris 150 Rapid Thermal Processing System (RTP) is a proven, state of the art versatile tool for Silicide formation, metal Alloys Group III Nitrides Reflow: BPSG, PSG contact anneal, Ferroelectrics, Implant anneal, HBT & MESFET Solar Cells, Implant monitoring Thermal donor, Si-Ge and LEDs.
Specification
The Solaris 150 is a manually loaded Rapid Thermal Processing System. Capable of processing silicon, III-V and other substrates up to 150mm diameter. The maximum temperature of operation is 1100 C.
Item ID #.
Last Updated: 23rd October, 2014
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